Within each thematic program of the Institute there are thematic projects carried out by different research groups. A description of research within each project is given below.

A list of funded EU, national and other projects is given here.

Program I: Micro and Nanofabrication

Project I.1: Lithographic materials

Project I.2: Lithography and plasma process

Project I.3: Front-end processes for Micro and Nanodevices

Project I.4: Thin films by chemical vapor deposition (CVD)

Program II: Nanostructures and Nanoelectronic devices

Project II.1: Nanostructures for nanoelectronics and photonics

Project II.2: Materials and devices for memory applications

Project II.3: Molecular materials as components of electronic devices

Program III: Silicon sensors and microsystems

Project III.1: Porous silicon technology and applications

Project III.2: Mechanical and chemical sensors

Project III.2B: Energy Harvesting Materials and Devices

Project III.3: Bio-microsystems

Project III.4: Thin films devices for large area electronics

Project III.5: Circuits and devices for optoelectronic interconnections