CLASS TITLE:

Microelectronics and Microsystems fabrication processes

 

 

Graduate programme on Micro and Nanosystems of the National Technical University of Athens.

Graduate programme on Micro and Nano Electronics of the National University of Athens

Class title:

Microelectronics and Microsystems fabrication processes

Semester:

Fall - 1ï

Instructors:

 

Evangelos Gogolides, Dimitris Davazoglou, Christos Tsamis, with invited lectures from Angeliki Tserepi, Elizabeth Tsoi and Androula Nassiopoulou

 

Graduate class description

Intoduction to planar technology and clean rooms. Patterning processes using lithography and plasma etching. Diffusion, oxidation and doping processes. Deposition processes of metals and dielectrics. For every process the basic physics and chemistry is introduced, the apparati used and the simulation models and tools available.

 

Recommended textbook
  1. Silicon VLSI Technology, Fundamentals, Practice and Modeling, J.D. Plummer, M. D. Deal, P.B. Griffin, Prentice Hall 2000

 

 

Prerequisite Knowledge

Undergraduate physics, chemistry, mathematics, electricity and electronics principles. Undergraduate microfabrication or VLSI fabrication class is greatly helpful.

 

Labs, exams, homework

Weekly homework problems, exams

Two demonstration labs for fabrication using lithography and plasma etching, and clean room demonstration