CLASS TITLE:

Plasma Processing for Micro and Nano Fabrication

Graduate Programme in Microelectronics, National University of Athens
Class title:	Plasma Processing for Micro and Nano Fabrication
Semester-Direction:	2^ο Elective Course Spring Semester Technology
Instructors:	Εvangelos Gogolides, Vasilios Constantoudis, George Kokkoris, and invited lectures from Angeliki Tserepi

Class Description

Introduction to gas discharges for material processing. Basic plasma physics: basic plasma quantities, electron collisions and cross sections. Electron impact processes, gas phase chemistry. Maxwell equations, Boltzman equation and its solution, continuity equations for charged and neutral species. Plasma diagnostics. Surface chemistry, micro and nanoscale topography evolution and nanotexture formation. Analysis of processed surfaces and nanostructures with AFM and SEM using fractal theory. Demonstration of plasma reactor operation, etching, plasma diagnostics, and in situ spectroscopic ellipsometry.

Recommended Textbook

1. Lecture Notes on Principles of Plasma Processing, by F. F. Chen, and J.P. Chang, Kluwer Academic/Plenum Publishers 2003.

Prerequisite Knowledge

Undergraduate physics, chemistry, mathematics, programming, elements of electricity, electronics. At least an undergraduate class in micro and nanofabrication processes for ICs or Microsystems.

Exams, homework

Homework sets, lab demonstration, final exam or homework assignments