CLASS TITLE:
Simulation of Micro and Nano-Patterning using
plasma processes
Graduate Programme of
mathematical Simulation in the School of Applied Mathematics and Physics of
the National Technical University
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Class title: |
Simulation of Micro and Nano-Patterning using plasma processes |
Semester-Direction:
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Spring Semester Technology |
Instructors: |
Εvangelos Gogolides, George Kokkoris, Vasilios Constantoudis, Angeliki Tserepi |
Class Description
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Α) Instructor Dr Evangelos Gogolides Introduction to micro and nano technology and to patterning processes. Introduction
to lithography and plasma etching. Charged particle motion in
electric and magnetic fields. Atomic and molecular collisions with electrons
in the gas phase. Basic Plasma equations.
Maxwell equations, Boltzmann equation, electron energy distribution. Mass, momentum, and energy
balances as moments of the Boltzmann equation. Chemical kinetics in the
plasma phase. Chemical kinetics on the
surfaces. Solution of mass, momentum
and energy balances in capacitively coupled
discharges. Solution of mass, momentum
and energy balances in inductively coupled discharges. B) Instructor Dr Vasilios Constantoudis Analysis of surfaces and
devices formed with micro and nano patterning. Surface and Line Edge
Roughness and the technological importance of its control. AFM and SEM surfaces Self affine and fractal
surfaces Analysis of AFM and SEM surfaces using
fractal and scaling theory. Feedback of scaling
analysis of surfaces to plasma process understanding. C) Instructor Dr. George Kokkoris Simulation of micro and nano structure fabrication Front evolution and process
evolution using level set methods • Front evolution methods • The level set method • Applications of the level set method • Applications of the level set method in plasma etching
for micro and nano fabrication D) Instructor Dr Angeliki Tserepi From theory to experiment Plasma reactors in the Plasma diagnostic methods. Demonstration of micropatterning process with plasma etching. Demonstration of plasma
diagnostics. |
Recommended Textbook
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Prerequisite Knowledge
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Undergraduate Physics, Chemistry, Calculus, and computer programming (e.g. C language, or Matlab). |
Exams, homework
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