CLASS TITLE:

Laboratory on Fabrication of Integrated Circuits

Graduate Programme in Microelectronics, National University of Athens
Class title:	Laboratory on Fabrication of Integrated Circuits
Semester-Direction:	Optional Course, Spring Semester Technology
Instructors:	Ε. Tsoi, D. Kouvatsos, A. Tserepi

Class Description

Training on the fabrication technology of N-MOS integrated circuits

Recommended Textbooks

1. “VLSI Technology”, S.M. Sze, ή “Si VLSI Technology”, J.D. Plummer, M.D. Deal and P.B. Griffin
2. Lecture Notes: “Clean rooms and technology for cleaning of Si wafers”, E. Tsoi, “Integrated processing for production of VLSI circuits”, D. Kouvatsos, “Laboratory infrastructure and processes in the clean room of IMEL”, Α. Tserepi

Prerequisite Knowledge

«Wafer processing for fabrication of Integrated Circuits», Course of Autumn Semester

Exams, homework

Homework and final exam