3rd International Conference on Micro-Nanoelectronics, Nanotechnology & MEMs
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  • Micro and Nano- fabrication and processing

Patterning technologies, Self-assembly, Thermal processes, Deposition techniques, Ion implantation, Metallization, Interconnect technology, Process modeling

  • Materials

Semiconductors (Si-based, II-V, III-V, SiC, Diamond), Epitaxial growth, Gate dielectrics, Polymers, Self-assembling/self-organizing materials, Nanostructures, Porous materials, Metamaterials and Photonic Structures, Magnetic materials, Electrical and optical properties, Interfacial structure and crystalline defects, Surface physics and chemistry, Theory

  • Devices

Deep submicron CMOS devices, Bipolar devices, (HBT’s, BJTs, IMPATT), Field effect transistors (MOSFETs, MISFETs, MESFETs, HFETs), Light emitting devices (LEDs, LDs), Other optoelectronic devices (detectors, modulators), Memory devices, Sensors and Actuators, Microwave devices, Measurements and modeling

  • Quantum devices and molecular electronics

Single and few electron devices, Resonant tunneling devices, Ballistic effects, Nanophotonics, Microcavities, Molecular devices, Characterization, Theory, Modeling

  • Integration, Circuits and Systems

Integration technology, Integrated circuits, integrated passives, MEMS, MOEMS, RF MEMS

  • Industry and Technology Transfer
 
 
 
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