The Institute of Microelectronics at NCSR “Demokritos” has recently bought an EBPG5000plusES system, a high-performance lithography tool, from Vistec Lithography Inc., a leading supplier of electron-beam lithography systems.

The Vistec EBPG5000plusES is a high-performance lithography tool based on reliable and well-proven system architecture. Due to its electron-optical column the system can expose various substrate types. The system provides a spot size down to <2.2nm, which allows the routinely generation of nano-dimensional features below 8nm. The system incorporates an interactive graphical user interface (GUI) that provides ease of use for diverse ?multi user environments."