NCSR - Demokritos
Welcome to the Institute of Microelectronics (IMEL) / NCSR "Demokritos"
Research Projects Project III.2

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Project Information per year
2012- 2011 - 2010 - 2009 -2008 - 2007 - 2006 - 2005

PROJECT III.2
MECHANICAL AND CHEMICAL SENSORS

 

Project leader: C. Tsamis, I. Raptis, P. Normand
Other Collaborating researchers: A. Tserepi
Post-doctoral scientists: S. Chatzandroulis, D. Goustouridis, E. Makarona, F. Farmakis
Phd candidate: R. Triantafyllopoulou


Objectives

- Development of micromachining processes for the realization of novel chemical and mechanical sensors
- Development of low power silicon sensors based on new materials and new processes
- Design, fabrication and testing of microsystems using silicon sensors
- Realization of sensors for specific industrial applications with emphasis on medical, food and automotive fields


Funding

- EU - IST-FP6-STREP-027333 Micro2DNA, “Integrated polymer-based micro fluidic micro system for DNA extraction, amplification, and silicon-based detection”, P. Normand
- GSRT – Technogenesis no 67, “Miniature sensor for the control dangerous tire pressure and malfunction of ball bearings and breaks”
- EU, IST, IP, GOODFOOD, “Food Safety and Quality Monitoring with Microsystems”, contract No. 508774, C. Tsamis
- GSRT Greece-Italy bilateral cooperation “Fabrication and characterization of an array of transparent conductive thin film polymeric composite as multiparametric sensitive layers for a new e-nose”, D. Goustouridis
- GSRT-PENED 03ED630, “Micromachined chemical sensors for controlling food safety and quality”, C. Tsamis
- GSRT- ENTER 05EP032, “Development of MOSFET type chemical sensors for wireless sensor networks”, C. Tsamis


RESEARCH in 2006

Research in 2006 focused in the following:
a) Alternative micro-hotplate design for low power metal-oxide (MOX) sensor arrays
b) Electronic ASIC for MOX Chemical Sensors
c) Polymer based chemical sensors
d) Capacitive Type Sensors
e) Suspended Cantilevers for Electromagnetic Energy Harvesters

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NCSR - Demokritos