Software for Line Width Roughness (LWR) Analysis

The program LWR_Demokritos aims at:

a) The detection of the edges of resist lines by analyzing their top-down SEM images.
b) The characterization of the roughness of the obtained line widths (LWR) using scaling analysis. The LWR parameters calculated by LWR_Demokritos are:
        i) line length independent "sigma" value 3sigmaLWR(inf),
        ii) correlation length "ksi" after which the edge looks flat,
        iii) roughness exponent "alpha" giving the relative importance of high frequency.

Download LWR software demo and manual (zip file)