Institute of Microelectronics

• G. P. Patsis, D. Drygiannakis, N. Tsikrikas, I. Raptis, E. Gogolides
Electron-Beam-Patterning Simulation and Metrology of Complex Layouts on Si/Mo Multilayer Substrates

RECENT CONFERENCES

Micro & Nano 2007
NCSR Demokritos, Athens, 18 - 21 November 2007

• M.-E. Vlachopoulou, P. Petrou, S. Kakabakos, A.Tserepi, E.Gogolides
Plasma nanostructuring of PDMS surfaces and its effect on protein adsorption

• N. Vourdas, M.-E. Vlachopoulou, A. Tserepi, E. Gogolides
Control of nano-topography and wetting properties of polymers: application in PMMA and PDMS

• P. Bayiati, A. Tserepi, P. Petrou, S. Kakabakos, E. Matrozos, D. Goustouridis, K.Misiakos, E. Gogolides
Hydrophobic plasma-deposited fluorocarbon films as a means for biofluid transport and selective adsorption of biomolecules on lab-on-a-chip devices

• G. P. Patsis
Modeling MOSFET Gate Length Variability for Future Technology Nodes

• M. Vasilopoulou, A. Botsialas, D. Georgiadou, L. Palilis, P. Bayiati, N. Vourdas, P. S. Petrou, G. Pistolis, P. Argitis
Flexible Organic Light Emitting Diodes (OLEDs) based on blue emitting polymers

• D.Kontziampasis, E. Gogolides
Oxygen Plasma Development of Silylated Epoxydized photoresists for Micromachining Applications

• N. Tsikrikas, G. P. Patsis, I. Raptis
Electron Beam Lithography Simulation Algorithm over Multilayer Substrates

• T. Manouras, A. M. Douvas, V.P. Vidali, M. Chatzichristidi, N. Vourdas, E.Gogolides, E.A. Couladouros, P. Argitis
Evaluation of polymers containing ketal or acetal groups in the backbone as candidate photoresist components

• D. Drygiannakis, G. P. Patsis, I. Raptis
Photoresist models for stochastic lithography

• P. Theodoni, P. Bayiati, M. Chatzichristidi, T. Speliotis, V. Vamvakas, I. Raptis, N.Papanikolaou
Efficient IR Emission from Patterned Thin Metal Films on a Si Photonic Crystal

• D.C. Moschou, E. Verelli, D.N. Kouvatsos, P. Normand, D. Tsoukalas, A. Speliotis, P.Bayiati, D. Niarchos
Investigation of top gate electrode variations for high-k gate dielectric MOS capacitors

AVS 2007
Seattle, USA, 14-19 October 2007

• N. Vourdas, G. Kokoris, E. Gogolides
Etching performance of thin polymeric and photoresist films

• G. Kokkoris, V. Constantoudis, G. Boulousis, P. Angelikopoulos, E. Gogolides
Mechanisms of Surface Roughness Formation and Evolution during Plasma Etching

EURO-INTERFINISH 2007
Athens, Greece, 18-19 October 2007

• N. Vourdas, M.-E. Vlachopoulou, A. Tserepi, E. Gogolides
Plasma processing in fabricating nano-textured, super-hydrophobic polymeric coatings

μTAS 2007
Paris, France, 7 - 11 October 2007

• P. Bayiati, A. Tserepi, P. S. Petrou, S. E. Kakabakos, E. Matrozos, E. Gogolides
Protein patterning through selective fluorocarbon plasma-induced deposition on silicon

IMA 2007
Rio - Patra, Greece, 30 September - 4 October 2007

• P. Bayiati, A. Tserepi, P. S. Petrou, S. E. Kakabakos, E. Matrozos, E. Gogolides
A method for biomolecular microarray fabrication via selective fluorocarbon plasma-induced deposition

• N. Vourdas, A. Tserepi, P.S. Petrou, S.E. Kakabakos, E. Gogolides
Processing for polymeric microfluidic fabrication: electrokinetic studies in PMMA

5th Workshop on Lithography Simulation 2007
Hersbruck, Germany, 28-30 September 2007

• G. P. Patsis, D.Drygiannakis, I.Raptis, E.Gogolides
Polymeric and molecular glass resist models for stochastic lithography simulation

MNE 2007
Copenhagen, Denmark, 23-26 September 2007

• N. Vourdas, K. Kontakis, A. Tserepi, E. Gogolides
Plasma processing in microfluidics fabrication

• D. Drygiannakis, G. P. Patsis, I. Raptis
Stochastic simulation studies of molecular resists for the 32nm technology node

• D. Drygiannakis, G. P. Patsis, I. Raptis
Processing effects on the dissolution properties of thin chemically amplified photoresist films

• M.-E. Vlachopoulou, P. Dimitrakis, A. Tserepi, V.E.Vamvakas, S.Koliopoulou, P.Normand, E. Gogolides, D.Tsoukalas
High density plasma silicon oxide thin films grown at room temperature

• K. Tsougeni, G. Boulousis, E. Gogolides, A. Tserepi
Oriented spontaneously formed nanostructures on Poly(dimethylsiloxane) films
and stamps treated in O2 plasmas

• A. Malainou, M.-E. Vlachopoulou, A. Tserepi, S.Chatzandroulis, R.Triantafyllopoulou
Gas chromatographic micro-column using PDMS as structural and functional material

XXIII HELLENIC CONFERENCE on SOLID STATE PHYSICS 2007
Athens, Greece, 23-26 September 2007

• M.-E. Vlachopoulou, N. Vourdas, G. Kokkoris, V. Constantoudis, G. Mpoulousis, A.Tserepi, E.Gogolides
Nanoroughness on plasma etched Si and polymer surfaces : Theory, experiment and applications

• D. Drygiannakis, G. P. Patsis, I. Raptis
Effects of photopolymer architecture on 45nm lithography

• N. Tsikrikas, G. P. Patsis, I. Raptis
Pattern matching and metrology on complex layouts

PESM 2007
Leuven, Belgium, 10-11 September 2007

• G. Kokkoris, V. Constantoudis, G. Mpoulousis, P. Angelikopoulos, E. Gogolides
Mechanisms of nano-roughness formation and evolution in plasma etching: application to Si etching

• N. Vourdas, G. Kokkoris, E. Gogolides
Plasma etching of thin and ultra-thin polymeric films probed with in situ spectroscopic ellipsometry

Past Events:

PhD Thesis Defense of Mr Nikolaos Vourdas, Chemical Engineer, MSc

Thesis Topic: Oxygen plasma etching, surface modification and nanotexturing of PMMA: Study of mechanisms and applications in PMMA microfluidic devices.

Thesis advisor-supervisor: Evangelos Gogolides

Other co-advisors: Angeliki Tserepi, Andreas Boudouvis

Date-Time: Monday November 26, 3:30pm

Place: Kumutsos Hall, Dept. Chem. Eng., National Tech. Univ. Athens, Zografou Campus

Click for thesis abstract