Services
We are happy to offer services at a small nominal
cost for our standard measurement and processing capabilitites to
all our colleagues in and out of Demokritos:
Silicon etching using the Bosch process
Polymer Etching using oxygen plasma
Polymer surface modification using oxygen plasma
Contact angle measurement
Ex situ spectroscopic ellipsometry for Silicon oxide, nitride, and
other standard films.
We are also happy to work with colleagues and do research for the
development of new processes of etching or Ellipsometry of more
complex material stacks.
For standard processes please contact Kostas Kontakis K.Kontakis@imel.demokritos.gr,
our engineer
and cc Evangelos Gogolides, evgog@imel.demokritos.gr.
For joined research contact:
Evangelos Gogolides evgog@imel.demokritos.gr
or Angeliki Tserepi ATserepi@imel.demokritos.gr.
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