NCSR - Demokritos
Welcome to the Institute of Microelectronics (IMEL) / NCSR "Demokritos"
Research Projects Project III.4

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Project Information per year
2012
- 2011 - 2010 - 2009 - 2008 - 2007- 2006 - 2005
- 2004


PROJECT III.4
THIN FILM DEVICES FOR LARGE AREA ELECTRONICS

 

Project leader: D. N. Kouvatsos
PhD candidates: M. Exarchos, L. Michalas (University of Athens)

Projects Running:

  1. Research grant from Sharp Laboratories of America. 2003-2005
  2. Greece-Serbia 2004-2006 bilateral research project.

Goals:
This research aims at the optimization of the active layer of polysilicon films obtained using advanced excimer laser crystallization methods and of the resulting performance parameters of thin film transistors fabricated in such films. Specifically, the targets are:

    • Evaluation of device parameter (a) hot carrier and (b) irradiation stress-induced degradation and identification of ageing mechanisms in TFTs fabricated in advanced excimer laser annealed (ELA) polysilicon films. Investigation of polysilicon active layer defects using transient drain current analysis in ELA TFTs.
    • Investigation of the influence of film thickness and crystallization technique on defects and on device degradation for ELA technology optimization.
    • Evaluation of bias stress-induced instabilities in solid phase crystallized (SPC) TFTs.


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NCSR - Demokritos