Project Information per year
2012 - 2011 - 2010 - 2009 - 2008 - 2007 - 2006 - 2005 - 2004
PROJECT I.1
FUNCTIONAL MOLECULAR MATERIALS
FOR LITHOGRAPHY AND ORGANIC/MOLECULAR ELECTRONICS
Project leader: P. Argitis
Other key researchers: I. Raptis, E. Gogolides, K. Misiakos
Post-doctorals: A. Douvas, M. Vasilopoulou, D. Goustouridis
Graduate students: M. Chatzichristidi, D. Niakoula, N. Vourdas, P. Economou, M. Kitsara, A.Kokkinis
Projects Running:
- 157 CRISPIES, Critical issues for 157nm lithography, EU IST, E. Gogolides
- SOARING, Source optics and resists for EUV lithography, EU IST, E. Gogolides
- INTEL- MoleEUV, συμβόλαιο συνεργασίας για EUV resists, E. Gogolides
- Microprotein, Micron scale patterning of protein and DNA chips, EU Growth, P. Argitis
- Sub HTS-, Submicron patterning of High Temperature Superconducting thin films, NATO Science for
Peace
- More Moore, EU FP6 Integrated Project (IST)
- Nano2Life, EU FP6 Network of Excellence (NMP)
Goals:
- Design and development of new resists capable for sub 100nm lithography following the roadmaps of Semiconductor Industry Association on the miniaturization of CMOS circuits
- Development of new lithographic schemes and appropriate polymeric materials for microsystem fabrication, with emphasis in the area of bio-microsystem
- Basic physicochemical studies and optimization of resist processing using standard and novel techniques and instrumentation
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Research
